Hand rubbing nuclear fusion live in the wilderness

Chapter 408 Photoresists for Carbon-Based Chips

After the graphene single crystal material was completed, South Korea cut the graphene single crystal material into wafers of suitable size through special means and preserved them.

These wafers can be used to make carbon-based chips after subsequent processing, so he will not throw them away.

It took some time to complete the preparation of the graphene single crystal material. South Korean won the carbon nanotube material, high-purity silicon carbide crystal material and other materials required for the preparation of carbon-based chips.

After a series of basic raw materials for manufacturing carbon-based chips have been processed and prepared, the next job is naturally to manufacture various necessary equipment.

Among them are the key photolithography machines and photoresists.

Carbon-based chips and silicon-based chips are different and the same.

The difference is that carbon-based chips can be processed on low-end and mid-range chips without using a photolithography machine.

Through some special means, such as laser etching, chemical vapor deposition and other methods, transistors can be built one by one inside the chip.

However, these special methods have great limitations and have an upper limit in terms of accuracy.

For example, the precision limit of etching circuits on wafers by laser etching is at the micron level. If it is lowered, using this method will easily burn through the gates and channels in the wafer circuits, which will lead to chip scrapping.

Therefore, in order for carbon-based chips to reach the nanometer level, the lithography machine is a threshold that cannot be bypassed anyway.

Huaguo's research on carbon-based chips wants to achieve cornering overtaking on this road, not because carbon-based chips don't need photoresists such as photolithography machines.

But before the emergence of the Korean won, if the carbon-based chip can be used, then the photoresist of the lithography machine can be temporarily bypassed.

Through this method, the performance of domestically produced chips can be pulled to the same height as foreign top chips, thereby breaking the foreign blockade.

Only by breaking the blockade and achieving self-sufficiency can we have enough time, energy, and capital to study deeper things.

This is the so-called 'overtaking on a curve', not the so-called direct leap to the sky, surpassing Miou.

After all, the top-level lithography machine is a scientific and technological product that has gathered the energy of the entire Western country for decades, and represents the highest level of human industrialized manufacturing. How could it be surpassed casually.

Of course, except for direct opening and listing like Korean won.

In the simulation space, it was another early morning. After getting up from bed, Han Yuan took care of his life, and then started the live broadcast. Viewers who received the subscription message entered the live broadcast room and greeted him one after another.

Coming out of the studio, Han Yuan carried several rolls of paper in his hand.

Although the central computer has been upgraded twice, it is enough to record various drawings in it, but the long-standing habit still allows Han Yuan to describe various design drawings on paper.

It's just that with the advancement of technology, the number of drawings required for each type of equipment is far greater than before.

In the past, four or five drawings of a generator could be completed, and even various spare parts could be drawn and marked with detailed data.

But now the lithography machine blueprints in his hand are dozens of sheets alone, and this is not detailed.

If it is necessary to write out all the materials and corresponding parameters that all the spare parts of the lithography machine need to use, let alone dozens of drawings, it may not be possible to handle hundreds of drawings.

This modern top-level industrial product is so complex and exquisitely designed that it is unimaginable for ordinary people.

With the lithography machine drawings taken out of the studio, Han Yuan came all the way to the processing plant.

Both the factory building and various industrial equipment here have been upgraded. Most of the industrial equipment is equipped with industrial chips, which can be controlled by the central computer.

Han Yuan put the drawings in his hand on the table, accurately found one of the rolls, and then rolled them out. The pattern of the lithography machine parts drawn on the drawings was displayed in the live broadcast room.

"This is part of a drawing of a lithography machine for carbon-based chip processing."

After the drawings were spread out, Han Yuan said: "It is somewhat different from processing silicon-based chips. The lithography machine for processing carbon-based chips has some adjustments in spare parts. The adjusted parts are mainly the light source part and the lens part."

"These two modules have been modified in order to be suitable for the photoetching of carbon-based chips."

"For example, the light source of the modified lithography machine, although it still uses extreme ultraviolet light, it uses a technology called 'off-axis illumination'."

"Compared with the original silicon-based chip lithography machine, this 'off-axis illumination' technology can improve resolution, depth of focus, contrast and so on to a certain extent."

"More suitable for photoetching of carbon-based chips."

With that said, Han Yuan found the corresponding drawing from the opened roll, spread it on the table, and showed it to the audience in the live broadcast room.

[Okay, now that I know how the lens forms an image, I can try to build a photolithography machine ()]

[Don't show it, do it quickly, we won't understand you if you show it anyway. 】

[The anchor made this, probably the most expensive lens in history. 】

[This is really not the most expensive lens, the most expensive lens should be outside the earth, at the L2 Lagrangian point. 】

[Weber: I'm flying, I'm flying, I'll be there as soon as I get on the high speed (dog head)]

[The main mirror of astronomy is a reflector, not a traditional glass transmission mirror. 】

[I've never understood the anchor's blueprints, and never understood the series. 】

[In terms of optical lenses, our country is really not very good. Just like glasses, a pair of domestic glasses costs more than a dozen yuan, but Zeiss glasses cost several thousand. Not only is the price difference really big, but even the use of it is really different. 】

[Upstairs, although we can't grind lenses, we can grind Hetian jade, as well as agate, jadeite, golden nanmu, and the beads can be round. 】

[The difference between us and the West is not a lithography machine, but the basic scientific research system behind the development of a lithography machine that includes dozens or hundreds of Nobel scientists and absorbs talents from all over the world. 】

[I want to know which is more difficult for the national football team to win the World Cup or domestic manufacturers to produce 2nm lithography machines in my lifetime. 】

[Upstairs, I'm afraid you won't be able to see the first one in your lifetime, and maybe you'll be able to see the second one next year. 】

Seeing the blueprint that Han Yuan took out, the audience in the live broadcast room started to complain after looking at it.

For the vast majority of viewers, unless they happen to be majors in drawing, it is impossible to understand the drawings he drew.

Even experts from various countries cannot understand it at a glance.

It's just that they will download the live broadcast, cut out the frame number part of the drawing inside, copy it and study it slowly.

There is not much difference between scientists and ordinary people. Except for a very small group of people with extremely high IQs, most of the remaining scientists rely on their persistent learning and exploration of knowledge.

Han Yuan glanced at the barrage and rolled up the drawing with a smile.

In fact, at this stage, whether he shows the blueprints or not, or whether he draws the blueprints or not, has no effect on him.

In the central computer, there is all the complete data and drawings, the kind that the computer can recognize and use directly.

When he showed the drawings, he actually showed them to the scientists who were squatting in the live broadcast room, or to the scientists in Huaguo.

After all, after reading the drawings and some information and data marked on them, it will be of great help to subsequent research and reproduction.

Rolling up the drawings, Han Yuan opened the computer peripherals in the workshop.

Although the newly built houses in the back have only one floor, they are all equipped with network cables and data cables, which are directly connected to the central computer.

There is only one set of display screen and control keyboard in the factory building, and all data and instructions are calculated, run and controlled by the central computer.

It took a lot of trouble to deal with the wiring in various factories and laboratories.

It's not that Won doesn't want to use wireless to transmit data and control information. He also tried to use wireless for control before, but later found that wireless transmission of information would be delayed.

And this kind of delay phenomenon will be a bit serious in rainy days, if it is just the normal life of ordinary people, it will not have any impact.

Just like the wireless transmission of information used by the equipment in his living room and work room, a slight delay is no problem.

But this delay cannot be applied to industrial equipment with extremely high precision control.

Especially for lithography machines, which are extremely demanding, a delay of milliseconds will cause problems.

Therefore, data transmission and program control in these places can only be wired for the time being, and wireless control may have to wait for him to upgrade several generations of signal transmitters.

Through the central computer, Won invokes the drawing tool, and then transfers some of the previously drawn drawings to the 'MSC-CNC eight-axis six-link CNC processing equipment'.

After receiving the command, the CNC equipment starts automatically, and the mechanical arms hold tightly to the materials he has prepared in advance, and then walk the processing process step by step according to the established procedures.

Han Yuan glanced at the 'MSC-CNC eight-axis six-linkage CNC processing equipment' that was operating normally, and after confirming that there was no problem, he sat back in front of the display screen and began to write the processing program of the lithography machine parts according to the drawings.

During the period after the central computer was assembled, in addition to transferring the computer system and various software, he also wrote some processing programs for photolithography into parts.

It’s just that due to time constraints, the number is not large. In addition, this time, he plans to rebuild all the photolithography machines suitable for carbon-based chip photolithography, so except for a very small number of parts, the original ones can be used. Both need to be remanufactured.

In this way, the processing of parts for lithography machines is a rather time-consuming task.

Fortunately, the industrial equipment has been upgraded as a whole. All the equipment is filled with control chips and connected to the central computer, which can be directly controlled by the central computer.

Secondly, the central computer is also upgraded, so that one computer can control multiple 'MSC-CNC eight-axis six-link CNC processing equipment'.

Otherwise, it will still be the same as before, and it will take at least three or four months to turn slowly through a CNC machining equipment, even if it rotates continuously for 24 hours.

Now multiple CNC machining equipment are processing different parts at the same time, and the overall efficiency has been greatly improved.

On the whole, Won's current industrial equipment plant still lacks an industrial robot to replace him to do some things like handling parts.

If there are industrial robots, then with the current industrial equipment and the capabilities of the central computer, coupled with the support of Xiaoqi, it is completely possible to achieve unmanned production.

Busy for [-] hours a day, it took a week, and Won finally finished writing the processing program for the parts needed to manufacture the lithography machine.

He has already prepared the corresponding alloys for most of these parts that can be processed by CNC equipment.

Through the satellite and the new central computer, coupled with the monitoring equipment deployed in the factory, Xiaoqi, who is far away in Mount Tai, China, can control the processing conditions of all parts of the factory.

Ensure the normal progress of parts processing, and contact him as soon as possible if there is a problem.

After dealing with the processing procedures of the parts, Han Yuan took a short rest, and then came to the chemical laboratory again.

Previously, carbon nanotubes and graphene single crystal materials were manufactured here, and now photoresists suitable for carbon-based chips are manufactured.

Photoresist is inseparable in the manufacturing process of silicon-based chips, and its importance is self-evident.

Photoresists used for silicon-based chips are mainly composed of film-forming resins, photoinitiators, and solvents, and some may also contain auxiliary components such as antioxidants, leveling agents, and tackifiers.

When the surface of silicon-based chips is processed, the desired image can be obtained on the surface by using an appropriate and selective photoresist.

This is one of the key points of how to transfer the circuit diagram on the mask plate to the wafer, and its importance is comparable to that of a lithography machine.

The precision of a chip is not only affected by the light wavelength of the scalpel of the lithography machine, but also by the precision of the photoresist.

If the precision of the photoresist is not enough, even if the wavelength of the light is enough, it cannot be processed.

Therefore, photoresist plays a vital role in the entire chip industry.

Top-level carbon-based chips, like silicon-based chips, are processed and prepared using a photolithography machine, so naturally a targeted photoresist is also required for etching.

As for graphene wafers and monocrystalline silicon wafers, although these two materials are semiconductors, because of their different properties, the photoresists required for exposure processing are naturally different.

Photoresist is roughly divided into two types on silicon-based chips.

One positive and one negative two categories.

After the positive type photoresist is applied to the wafer, after exposure and development, the exposed area is dissolved, and the unexposed part remains. This is the positive type photoresist.

On the contrary, it is a negative type photoresist.

Silicon-based chips are like this, but carbon-based chips are not.

Carbon and silicon, in terms of elemental properties, the stability of carbon is greater than that of silicon.

As for both semiconductor materials, the stability of graphene wafers is also greater than that of single crystal silicon wafers.

Therefore, there is only one kind of carbon-based photoresist with high precision, and that is negative photoresist.

(End of this chapter)