Big Country Intelligent Manufacturing

"Don't be discouraged, doing research and development is the case, what is the problem?" Xu Zhenming cheered Guo Liansheng on the phone, and then arranged for the driver to send him to the No. 3 factory of Mingxin Manufacturing Company.

In the dust-free workshop, Guo Liansheng's team was disassembling the outer shell of the etching machine, and the workers were sullen and working without a word.

"Xu Dong, it seems that the quality of the domestic plasma generator is not good, and the host system of the foreigner is not compatible." Seeing Xu Zhenming coming, Guo Liansheng took off his mask and shook his head with a wry smile at Xu Zhenming.

Xu Zhenming is already a layman for high-precision mechatronics products such as etching machines.The etching machine uses a plasma beam to clean the photoresist, and the naked eye can only see a beam of light sweeping on the silicon wafer, unless a high-precision electron microscope is used to see the circuit etching of some silicon wafers.

Therefore, Xu Zhenming did not know how to pretend, but frowned and asked: "Do you think this is a mechanical problem, a control problem, or a system problem?"

According to Xu Zhenming's understanding, before the test, Guo Liansheng's team should have done some debugging experiments with a domestic etching machine.He wanted to know whether it was stable when using a domestic etching machine to etch chip circuits, and whether there were any successful cases.

"There have been, but it's very unstable. Sometimes it can be 130nm, sometimes it can't. So we use the substitution method to find the reason."

"Then you are far from success." Xu Zhenming couldn't help but waved his hand, indicating that Guo Liansheng should calm down and hold a technical seminar to discuss the reasons for the unstable failure of the domestic etching machine.

Seeing this command from the boss, Guo Liansheng waved to several engineers with glasses, "Stop all of them, let's go to the conference room for a meeting."

Before long, everyone came to an internal small conference room in the clean room, and everyone sat around the small conference table under the shadowless lamp.

"You can talk about it first, where is the real reason for the instability of our domestic etching machine?" After everyone was seated, Guo Liansheng glanced at the engineers under his gloomy expression.

"Xu Dong, I think there is a problem with our research and development thinking. The research and development of etching machines should take the road of domestic production gradually."

"I think Xiao Wang is right. We should first make the plasma generator, the core component of the etching machine, and then make the host system. As for the automation control system, that is our strength and will not be considered."

"Hasn't the plasma generator been made? The key point is that the light source of this system is unstable!"

The engineers who were hit were a little frustrated, thinking that the problem was the plasma generator.

The plasma generator is the work of Professor Hao Ning's team, but the mechanical part is the cooperation of Hong Aiguo's team.Now Professor Hao Ning and Hong Aiguo need to send someone to check the cause.

Hearing this discussion, Guo Liansheng's face looked ugly, "We can't shirk responsibility. We should be responsible for checking and debugging this fault."

In his opinion, Professor Hao Ning of the light source system has done many experiments, and has taken pictures of the chest to ensure that there is no problem and that there will be no instability of the plasma beam; the bases and brackets made by the Hong Aiguo team are all used the most. Advanced CNC machine tools are all machined, and the accuracy is definitely no problem.

So today's situation, as well as the failure of the previous few tests, etc., are all designed by their semiconductor equipment manufacturing company, or assembly and debugging problems.

After listening to this short story, Xu Zhenming finally understood what was going on.