Big Country Intelligent Manufacturing

"Lao Wan, what do you think?" Xu Zhenming did not directly answer Professor Hao Ning, but stood up and asked Wan Ning Gu.

At this time, Wan Ninggu was wiping the stains on his hands with a rag, his face showed hesitation.

He somewhat believed in Liang Songsong's judgment and believed that there was no need to test the laser optical system twice.However, this plan of three consecutive laser energy tests was originally scheduled, and it is indeed too much to immediately overturn it.

What's more, Professor Hao Ning is an expert in optics in the team, and his plan is definitely scientific.How can they laymen command casually.

Thinking of this, he smiled bitterly at Xu Zhenming: "Xu Dong, I think Professor Hao Ning is a professional, and the plan should be very professional. Let's implement it according to the predetermined plan."

"Okay! I agree with you that professional matters should be handled by professional people." Xu Zhenming smiled and took the rags from Wan Guning.He settled the dispute between Hao Ning's team and Liang Songsong.

In fact, according to Xu Zhenming's idea, he would have been inconvenient to participate in the decision-making of such high-precision technology projects.But what Professor Hao Ning has to do now is to repeat the test twice, at most wasting some time and money.As Xu Zhenming can bear it, Yiming Group does not lack this resource.

What's more, Professor Hao Ning should not be aimless, having his own professional and technical considerations.

At this point, Xu Zhenming waved to Professor Hao Ning, “Professor Hao, the testing process of your team must be executed in accordance with the predetermined plan. Don’t be afraid of spending money. Our group company is not afraid of spending money on projects.”

"Okay Dong Xu." Professor Hao Ning nodded with a smile and started to get busy.

As the person in charge of the project team, Liang Songsong was a little embarrassed at this time, and felt even more uncomfortable. "These buns don't listen to the old man, and they are facing a loss."

Liang Songsong didn't say a word, and stood there for a while to see the operation of Professor Hao Ning's team, and for a while to look at the testing process of the group of people from Wanninggu.

At this time.

The team members of Wanninggu have connected the host system of the lithography machine to various test instruments, and immediately check the repetition accuracy, motion accuracy, vibration data, power output data, and power changes during operation of the host system again. Data, electromagnetic clutter data, etc.

This set of experimental testing procedures is also the testing technical solution that has been discussed repeatedly just now.The main purpose is to take a look at the various data of the host system of this domestic lithography machine and see if it has changed from the previous test report.

If there is no change, it would be a little troublesome!

As a key project of Yiming Group, after the final assembly and commissioning of the host system of this domestic lithography machine, it has actually been tested many times.If the data does not pass, Hu Mingzhen, the project leader, will not immediately conduct a general adjustment test of the lithography machine.

However, there was a lithography quality defect in the lithography test this morning. If there is no problem with this equipment, the logical explanation is not clear.

With this kind of doubt, Wan Ninggu accompanied Xu Zhenming to the inspection and debugging workstation of the host system of the lithography machine, keeping his eyes fixed on the monitor screen of the workstation.

Soon, what he worried about appeared...

When the host system of this lithography machine completes a simulation lithography execution program, the data displayed on the monitor is normal, and the accuracy error is within the allowable range.

"Reported to Dong Xu that the repetition accuracy of the host system is less than 0.001 mm and the data is normal."

"Reported to Mr. Wan, the vibration error of the host system is within the order of magnitude and will not affect the lithography process."

"Report to Mr. Wan that the power output of the host system has always been very stable, and there is no fluctuation in the simulation lithography process."

"The electromagnetic clutter intensity of this device is within the required magnitude range, and there is no abnormality."

"..."

The technicians are very dedicated and will report the situation truthfully every time a piece of data appears.

Through their comparison, the data of the main system of this lithography machine and the original test data have not changed.This is a bit strange!

On the other hand, Professor Hao Ning's team has completed the energy test process of the laser light source, and everything is normal.

Not only that, they have completed the first spectrum test of the laser light source, and the astigmatism error of the laser in the air is very small, within the normal range.

From this point of view, the laser light source system of the Miguo has no quality problems and its performance is very stable.

Seeing this scene, Liang Songsong was also a little dumbfounded, "The unit tests of both systems are normal, and there are quality defects after the assembly. What the hell is this?"

"This...this thing is a bit evil!" Wan Ninggu was also a little confused at this time, spreading his hands, looking at Xu Zhenming with a wry smile, and shook his head.

At lunch today, he was reminded by Liang Songsong that his inspiration came out. In fact, he had initially judged the fault of this lithography machine.According to his vision, the domestic laser optical system must be no problem, and the domestic lithography machine must have a problem.

But after some testing, the conditions of these two devices are normal. What is the problem?

"Both devices are normal, but they are not normal when assembled together. When assembling, what modification procedures have we made?"

At this time, Xu Zhenming slowly squatted down and his eyes fell on the connection mechanism of the main system of the lithography machine.His meaning is very clear, it is the connection agency that has a problem.

"Think about it, I think the connection and assembly mechanism of the two devices is malfunctioning." Professor Hao Ning looked at Xu Zhenming and said his guess.

"Impossible! The connecting mechanism of our lithography machine is manufactured with the most advanced processing center of the group company, and the processing accuracy can be guaranteed." Wan Ninggu squatted down as he spoke.

At this time, Liang Songsong was a little dazed.Out of self-confidence, he casually denied Wanninggu’s judgment, “How could it not be possible? Our group company’s machinery manufacturing level is about two generations worse than that of the U.S., how can the machining accuracy be guaranteed? In my opinion, this is this one. There is a problem with the connection mechanism of the main system of the lithography machine."

"We can't talk nonsense, we have to use experimental data to speak." Wan Ninggu refused to admit defeat, touched the connection mechanism of the host system with his finger, and felt the processing surface of the connection mechanism.

The processing surface of this group of connecting mechanism is very smooth, and the curve and smoothness should not be found by visual inspection.

Therefore, Xu Zhenming was not prepared to use his fingers to experience this unusual connection mechanism.He observed for a while, then turned his face to ask Wanninggu: "Lao Wan, can we use a separate mode for lithography experiments?"

Wanning Gu Wenyan shook his head, "The lithography machine is a precision equipment, and the two systems must be assembled together to work. Otherwise, the accuracy of the lithography tape-out cannot be guaranteed."

According to him, the native method cannot solve the current testing dilemma, which is a bit difficult.