my tech museum

Chapter 97 Preparation of photoresist

After so many years of research and development of lithography machines, everyone knows the theoretical system, but whether it can be realized with technology is very important.

Although Xu Lei took the lead in solving the light source system, it can achieve high resolution and service life.

Formulatable photoresists are trickier.

Nihong Guoneng provides high-end photoresist to overseas lithography machine companies, largely by virtue of its own development in the field of special materials.

Due to the relatively weak foundation of this industry in China, many raw materials need to be developed by Xu Lei from scratch, which will naturally be much slower in terms of efficiency.

Moreover, to ensure that 3nm or even 1nm chip circuits are etched on the wafer, the requirements for photoresist are even higher. At least the grade must exceed the photoresist used by overseas high-end lithography machines. If the top-level lithography machine that comes out is not matched, it will become a sword with a rotten wooden sheath, which will be awkward no matter how you look at it.

As for the research and development of the objective lens system, the progress is obviously much faster.

The lenses used by overseas high-end lithography machines basically come from German companies.

And each lens on the lens is manually polished to ensure that the lens is free of any flaws.

Although there is no craftsman of this level in Huake Academy, relying on Xingtong's powerful intelligent computing power and Xu Lei's control, the final polished lens can meet the needs of top-level lithography machines.

So in this case.

Finally, when the components of the lithography machine are successfully assembled and can be tested.

Only the photoresist remains unresolved.

This makes others have to wait patiently, believing that Xu Lei can prepare top-level photoresist.

However, because the Chinese Academy of Sciences had previously released the wind, it said that domestic lithography machines could be put into use around the Spring Festival.

So seeing the time go by day by day, everyone began to feel nervous.

Especially Dean Yang Senping.

Almost moved his office to the laboratory.

Most of the time stay in the project research center.

of course.

In addition to caring about the progress of the project, more importantly, he wants to ensure that there will be no mistakes in the new project research team here, so as to avoid serious impact when the time comes.

After screening the project team members he was in charge of before, it was found that one of them had a special connection with overseas forces.

And after the investigation, it was determined that the other party had spread the news of the disbandment of the project team.

Although Yang Senping dealt with this seriously in accordance with the regulations, he did not want to see a similar situation in the new project team that Xu Lei was in charge of, so he came to the laboratory more frequently than in the first few days.

Soon, the time came to late January.

When the future technology companies have already taken their annual leave normally, all members of the research team of the lithography machine project of the Chinese Academy of Sciences still stick to their jobs.

It's just that compared with last month's full of confidence, most people now have an urgent look on their faces.

"Dean Yang, the Spring Festival is only a few days away."

"But the problem of photoresist is still not resolved, and if this continues, it will definitely cause a lot of trouble on the Internet."

This morning.

Outside the chemistry lab.

As a scientific researcher said this sentence in front of Yang Senping, everyone immediately started talking about what they were thinking at the moment.

"Since the guarantee has been made to the public, it must be done no matter what."

"The last announcement was too radical. If we had more time, we wouldn't need to think about this issue right now."

"I propose to use the photoresist that is currently formulated. Even if it is not top-quality, it is enough to produce 7-nanometer chips, which will still shock the outside world."

……

Although Xu Lei has not prepared the photoresist he wanted for the time being, the research during this period is not without results.

The newly formulated photoresist can be said to have reached the standard used by overseas photolithography machines.

If it is used on domestic lithography machines in this way, it will still cause a global shock, and it will also draw a successful conclusion to the previous announcement.

However, Xu Lei's goal from the very beginning was to reproduce the top-level lithography machine collected in the museum. If the effect is greatly reduced just because of a photoresist, this is something he cannot accept.

So even if the Spring Festival is approaching, I still let myself soak in the laboratory.

Yang Senping listened to everyone's words, and seemed very conflicted in his heart.

Not sure how to go about this.

But from a purely selfish point of view, he still prefers to maintain the reputation of the courtyard.

Anyway, it seems that there is no big problem to announce the research results at this stage first, and then continue to prepare top-level photoresists.

But in the end, after careful weighing, Yang Senping did not directly make a decision, but turned his attention to Hao Yaoping next to him, wanting to ask his opinion.

After all, Hao Yaoping is the oldest academician in the project research team, and many of them are even his students.

Talking is better than the dean in some places.

"How does Mr. Hao think about this matter? Do we need to announce the current research results in this situation?"

Hao Yaoping, who was sitting quietly by the side and listening to the debate, saw that Yang Senping brought the topic to him, so he cleared his throat and said a few words.

"We were able to assemble this top-level lithography machine, and its technologies are far superior to those of overseas companies, most of which are thanks to Xu Lei."

"Without him, let alone an announcement to the public, I'm afraid it won't be effective after a few years of research."

As Hao Yaoping's voice rang in everyone's ears, everyone blushed unavoidably, but they dared not raise any objections.

Who makes it so.

Hao Yaoping saw everyone's performance in his eyes, paused for a few seconds, and continued to speak: "Since XCMG is sure to prepare photoresist suitable for top-level photolithography machines, we should fully support it."

"Until the photoresist comes out."

"As for the outside discussion, do we scientific researchers need to care about these?"

When Hao Yaoping's voice fell, Yang Senping immediately understood that the matter had been concluded, so he quickly took advantage of the atmosphere and announced on the spot: "Old Hao is right, XCMG is in charge of the entire project research team, as long as he has no such plan Then we will wait patiently for this photoresist to be formulated."

"At that time, our technology in chip manufacturing will also far exceed that of overseas companies."

Having said that, other people will naturally stop discussing, and then they also returned to their jobs to conduct new tests and optimizations on the various components of the lithography machine.

Make sure there are no special situations when the photoresist comes out and the actual test is performed.

It has to be said that the concerns of the members of the project research team are very reasonable.

Although there are still a few days before the Spring Festival, I don’t know if it’s because of the relatively free holidays. Many netizens spontaneously sent urges to the official account of the Chinese Academy of Sciences.

After that, it was featured on two trending searches every day, and it almost became a daily repertoire.

As for professional companies in the industry, although they did not use this method to ask questions like netizens, they are also very concerned about it.

I want to know what level the domestic lithography machine has reached.

This is mainly related to the development of related industries.

The sooner the specific situation is known, the sooner the layout can be made, which is conducive to subsequent development.

But what had the greatest impact was the amplified report of the matter by overseas media, which pointed out that it was impossible for the Chinese Academy of Sciences to develop a high-end lithography machine.

In addition, in the face of such great external pressure, the Chinese Academy of Sciences did not make any response, which invisibly increased everyone's suspicion.

On the major platforms and websites of the entire network, you can see heated discussions under any relevant content.

"I may be really disappointed this time. It seems that the research and development of domestic lithography machines still has a long way to go."

"It's okay to be behind in technology. The key is to release this kind of news deliberately. It has no effect except to let everyone experience a huge gap."

"There are still a few days until the Spring Festival, where is the lithography machine?"

"Everyone, let's wash up and continue to sleep. There is no lithography machine, it's all just a dream."

"I can't figure out whether there is a need to be so anxious. People said that it was around the Spring Festival. What are you questioning now?"

"The next decade or so is counted, playing word games is useless."

"While you are still questioning this controversy, smart people have already studded the semiconductor industry fund."

"What a ruthless person, even in this situation, you dare to stud funds. I remember correctly that the relevant industries have been falling for several days."

……

Among the many comments and messages, although some are willing to believe in domestic lithography machines, they can't make any waves amidst the wave of doubts.

Totally unremarkable.

Compared with the turmoil in the outside world, at this moment Xu Lei is keeping a deaf ear to the outside world, focusing on the photoresist with all his heart.

"The main material must minimize high absorption elements, introduce special metal oxides to increase the photosensitive speed of lithography, enhance the corrosion resistance of the system, reduce the film thickness of photoresist, and finally further improve the resolution."

"It should be fine this time.

"As long as it is successfully completed, a photoresist suitable for top-level photolithography machines can be prepared."

Friday, November 2020, 1.

New Year's Eve.

Inside the Chemistry Laboratory of the Chinese Academy of Sciences.

At this moment, Xu Lei was wearing a laboratory operation suit, standing by the workbench and fiddling with various precision instruments on it.

Although he couldn't see his specific expression, judging from the murmuring voice in his mouth, he was confident this time.

Then, with the cooperation of several assistants, the special metal oxide was introduced into the system material, and under the automatic operation of the equipment, a photoresist that could be directly applied on the wafer was gradually formed.

However, whether it can achieve the desired effect and successfully produce 3nm chips still needs to be tested on the lithography machine.

As for the 1-nanometer chip, which is called the physical limit, it cannot be produced for the time being because the required special metal materials have not yet been delivered.

But what is certain is that although everyone did not go home this Spring Festival, it must be the happiest and most exciting day in decades.

(End of this chapter)